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100 μm x100 μm x10 μmXY: 0.4 nm
Z: 0.04 nmEFM, KPFM, PFM, SCM, MFM, C-AFM(Option) -
Maximum 100 μm x 100 μm x 10 μmZ: 0.05 nm;
X/Y: 0.5 nmEFM, KPFM, PFM, MFM -
16ps10ns1
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16 ps10 ns4
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1ps2ns4/8/16
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4ps4ns9
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1 μHz to 1MHz1 nV to 5 V＞120dB
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1μHz to 100kHz/500kHz/1MHz1 nV to 5 V＞130dB
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50 mHz to 120 kHz1 nV to 1 V> 120 dB
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