STEG series panel laser probe platform is mainly used to analyze THE TEG circuit of LCD screen, test electrical parameters, and realize a fully automated testing application equipment. This product can quickly and accurately analyze and judge the performance of the product, and further repair the defects of the product, greatly improving the yield and economic benefits of the enterprise production.
TEG Electrical testing of OLED/TFT-LCD panels.
Fastest testing speed in the industry
Stable test results
Linear Motor platform with 0.1μm resolution
Minimal damage
Ultra-high precision
Mult-probe card design
Automatic needle cleaning, Automatic AOI location
Automatic test
| Model | STEG prober-G6 STEG prober-G8.5 |
| Electricity Demand | 380V, 50Hz, 3Phase, approx. 50A Max |
| Dimension | STEG prober-G6: L: 2500mm * W: 2850mm * H: 2500mm STEG prober-G8.5: L: 3500mm * W: 4000mm * H: 2500mm |
| Weight about | STEG prober-G6: 9700KG STEG prober-G8.5: 14200KG |
| Panel size | STEG prober-G6: L * W ≤1500 * 1850mm, Thickness ≤ 3mm STEG prober-G8.5: L * W ≤ 2500 * 2200mm, Thickness ≤ 3mm |
| 1. Platform function | |
| Gantry structure | Bridge design, can choose double gantry |
| X-Y-Z travel range | STEG prober-G6: 1850 * 1500 * 58mm STEG prober-G8.5: 2500 * 2200 * 58mm |
| X-Y velocity | 0~600mm/s adjustable |
| X-Y resolution | 0.1μm |
| X-Y Repeatability | ±1μm |
| X-Y axis drive | Linear motion + Grating ruler |
| Z velocity | 0~10mm/s adjustable |
| Z resolution | 0.25μm |
| Z Repeatability | ±1μm |
| Z axis drive | Servo motor + Grating ruler |
| Z axis protection | Motor self-locking + Mechanical limit protection |
| Platform flatness | ±50μm |
| Platform coating | Antistatic coating |
| Platform high/low temperature | Temp Chuck or Thermal Stream ( -55~200℃ ) |
| 2. Microscope | |
| Optical circuit system ratio | 5X, 10X, 20X, 50X Objects |
| Magnification range | 50X ~ 500X |
| Focus | Auto focus |
| CCD pixel | 200w/500w |
| Light source | TOP/Bottom coaxial LED light Light adjustable independently |
| 3. Laser | |
| Laser system | Laser cutting system（2.2mj /Pluse Maximum@50Hz ) 0-100% |
| Laser wave length | 1064nm, 532nm, 355nm |
| Spot scale | 1.0um @ 100X object 2.0um @ 50X object |
| Work pattern | One Shot / Burst / Continue |
| Shape | Adjustable rectangle |
| Module No. | Item | Description |
| STEG prober-G6 | Laser Probe Station | Electricity Demand: 380V, 50Hz, 3Phase, approx. 50A Max; Weight (about): 9700 kg; Dimension: 2500mm*2850mm*2500mm (L*W*H). |
| STEG prober-G8.5 | Laser Probe Station | Electricity Demand: 380V, 50Hz, 3Phase, approx. 50A Max; Weight (about): 14200 kg; Dimension: 3500mm*4000mm*2500mm (L*W*H). |
