STEG Panel Laser Probe Station

STEG series panel laser probe platform is mainly used to analyze THE TEG circuit of LCD screen, test electrical parameters, and realize a fully automated testing application equipment. This product can quickly and accurately analyze and judge the performance of the product, and further repair the defects of the product, greatly improving the yield and economic benefits of the enterprise production.

Application direction:

TEG Electrical testing of OLED/TFT-LCD panels.

Key Features

Fastest testing speed in the industry

Stable test results

Linear Motor platform with 0.1μm resolution

Minimal damage

Ultra-high precision

Mult-probe card design

Automatic needle cleaning, Automatic AOI location

Automatic test


STEG prober-G6

STEG prober-G8.5

Electricity Demand

380V, 50Hz, 3Phase, approx. 50A Max


STEG prober-G6: L: 2500mm * W: 2850mm * H: 2500mm

STEG prober-G8.5: L: 3500mm * W: 4000mm * H: 2500mm

Weight about

STEG prober-G6: 9700KG

STEG prober-G8.5: 14200KG

Panel size

STEG prober-G6: L * W ≤1500 * 1850mm, Thickness ≤ 3mm

STEG prober-G8.5: L * W ≤ 2500 * 2200mm, Thickness ≤ 3mm

1. Platform function
Gantry structure

Bridge design, can choose double gantry

X-Y-Z travel range

STEG prober-G6: 1850 * 1500 * 58mm

STEG prober-G8.5: 2500 * 2200 * 58mm

X-Y velocity

0~600mm/s adjustable

X-Y resolution


X-Y Repeatability


X-Y axis drive

Linear motion + Grating ruler

Z velocity

0~10mm/s adjustable

Z resolution


Z Repeatability


Z axis drive

Servo motor + Grating ruler

Z axis protection

Motor self-locking + Mechanical limit protection

Platform flatness


Platform coating

Antistatic coating

Platform high/low temperature

Temp Chuck or Thermal Stream ( -55~200℃ )

2. Microscope
Optical circuit system ratio

5X, 10X, 20X, 50X Objects

Magnification range

50X ~ 500X


Auto focus

CCD pixel


Light source

TOP/Bottom coaxial LED light

Light adjustable independently

3. Laser
Laser system

Laser cutting system(2.2mj /Pluse Maximum@50Hz )


Laser wave length

1064nm, 532nm, 355nm

Spot scale

1.0um @ 100X  object

2.0um @ 50X  object

Work pattern

One Shot / Burst / Continue


Adjustable rectangle

Main Machine

Module No. Item Description
STEG prober-G6 Laser Probe Station Electricity Demand: 380V, 50Hz, 3Phase, approx. 50A Max; Weight (about): 9700 kg; Dimension: 2500mm*2850mm*2500mm (L*W*H).
STEG prober-G8.5 Laser Probe Station Electricity Demand: 380V, 50Hz, 3Phase, approx. 50A Max; Weight (about): 14200 kg; Dimension: 3500mm*4000mm*2500mm (L*W*H).

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