SKH Series Integrated Manual Probe Station

SKH series is a high-end comprehensive manual test probe configuration, the device has excellent stability and maneuverability, and the test precision are higher than that of the rest of the industry brand, unique pneumatic chuck mobile technology flexible UPStart modular structure design enhance sexual shockproof system, these are all saluki advanced innovation technology advantage in the industryAt the same time, the equipment can support late expansion and upgrading, to meet the needs of customers for a variety of test applications. No matter now or in the future, when customers’ test needs increase or change, the equipment can be reconfigured and upgraded to truly realize multiple applications with one machine. The equipment is very suitable for the one-step budget acquisition and investment of r&d centers and laboratories in universities.

Application direction:

It is suitable for scientific research and analysis of nano micro devices, spot check and detection, etc., to quickly analyze and test the circuit of the chip on the wafer and judge the product performance by the electrical parameters, and then reduce the loss of the chip defects to the product, so as to improve the yield and carry the rf characteristic test and upgrade and carry the optical fiber spectrum characteristic test.

Key Features

Stable structure, Platen can be quick lifted and fine-tuned, Suitable for probe card installation and usage

Compatible with high magnification metallographic microscope

Suitable in University and Research laboratory

Up to 12-inch wafer testing

High precision lead screw drive structure, linear movement

Comfortable large handle, Driver Screws: Zero back lash

Internal circuit/ electrode/ PAD probe

LD/LED/PD Light intensity / wavelength testing

IV/CV Characteristic testing of materials / devices

High frequency characteristic test of devices (up to 300GHz frequency)

Model

SKH6

SKH8

SKH12

Electricity Demand

220VC, 50~60Hz

Weight (about)

SKH6: 170kg

SKH8: 230kg

SKH12: 300kg

1. Chuck
Size & Rotation Angle

SKH6: 6″, 360° Rotation

SKH8: 8″, 360° Rotation

SKH12: 12″, 360° Rotation

X-Y Moving Range

SKH6: 6″ * 6″

SKH8: 8″ * 8″

SKH12: 12″ * 12″

Moving Resolution

1μm

Sample Fixed Mode

Vacuum adsorption

Electrical Design

Electrical Floating with Banana plug adapter, can be used as a backside electrode

2. Platen (U Shape)

SKH6: 6 mcropositioners available

SKH8: 8 micropositioners available

SKH12: 12 micropositioners available

3. Microscope
Moving Range

X-Y axis : 2″ * 2″,  Z axis : 50.8mm

Magnification

20~4000X

CCD Pixel

50W (Analog) / 200W (Digital) / 500W (Digital)

4. Micropositioner
X-Y-Z Moving Range

12mm-12mm-12mm / 8mm-8mm-8mm

Mechanical resolution

10μm / 2μm / 0.7μm / 0.1μm

Current Leakage Accuracy

Coaxial 1pA/V @ 25 ℃; Three shaft 100fA/V @ 25 ℃; Triaxial 10pA@3kv @25°C,Test conditions: dry environment for grounding shield (air dew point lower than – 40 ° C)

Cable Connectors

Banana head / Crocodile clip /  Coaxial / Triaxial

Dimension

SKH6: 820mm*720mm*890mm (L*W*H)

SKH8: 960mm*850mm*900mm (L*W*H)

SKH12: 1300mm*920mm*920mm (L*W*H)

Main Machine

Module No. Item Description
SKH6 Integrated Manual Probe Station Electricity Demand: 220VC, 50~60Hz; Weight (about): 170kg; Dimension: 820mm*720mm*890mm (L*W*H).
SKM6 Integrated Manual Probe Station Electricity Demand: 220VC, 50~60Hz; Weight (about): 230kg; Dimension: 960mm*850mm*900mm (L*W*H).
SKM6mini Integrated Manual Probe Station Electricity Demand: 220VC, 50~60Hz; Weight (about): 300kg; Dimension: 1300mm*920mm*920mm (L*W*H).

Optional Accessories

Module No. Item
SKH01 Chuck quick roll out mechanism
SKH02 Microscope tilt mechanism (Tilting 30° manually by Lever )
SKH03 Microscope pneumatic lifting mechanism
SKH04 Laser repair with cutting,ablation and welding function
SKH05 Probe clamp
SKH06 Dark field of microscope / DIC / Normarski test, Light intensity / wavelength test
SKH07 IC hotspot detection by LC
SKH08 High voltage and high current measurement
SKH09 Hot chuck
SKH10 High/Low temperature chuck
SKH11 Shielding box
SKH12 Special adapter
SKH13 Vibration free table
SKH14 Gold-plated chuck
SKH15 Coaxial / Triaxial chuck
SKH16 Chuck quick move-out and fine adjustment mechanism
SKH17 Chuck rotation fine adjustment
SKH18 Light intensity / wavelength testing
SKH19 RF Testing
SKH20 Active probe
SKH21 Low current / Capacitance test
SKH22 Intergration of integral sphere
SKH23 Fixture for Fibre optic coupler test
SKH24 Fixture of Package IC test
SKH25 Fixture of PCB test

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