SKE Series 150mm Economical Manual Probe Station

SKE series prober has excellent mechanical system, stable structure and performance, ergonomic design, more convenient operation, support multi-function upgrade, more abundant product functions. The product is mainly used in the manufacturing and research fields of integrated circuit, LED, LCD, solar cell and other industries.

Application: IC/LD/LED/PD test, PCB / Packaged device test, RF test etc.

Key Features

Compact design, affordable price

Compatible with high magnification metallographic microscope, and can fine tune the movement

University / Institute / Company laboratory use

Up to 12 inch wafer testing

Precision lead screw drive structure, linear movement

Driver Screws: Zero back lash

Available for 1um electrode / PAD probe

LD/LED/PD Light intensity / wavelength testing

IV/CV Characteristic testing of materials / devices

High frequency characteristic test of devices (up to 300GHz)






Electricity Demand

220VC, 50~60Hz

Weight (about)

SKE4: 70kg

SKE6: 80kg

SKE8: 85kg

SKE12: 180kg

1. Chuck
Size & Rotation angle

SKE4: 4″, 360° Rotation

SKE6: 6″, 360° Rotation

SKE8: 8″, 360° Rotation

SKE12: 12″, 360° Rotation

X-Y Travel Range

SKE4: 4″ * 4″

SKE6: 6″ * 6″

SKE8: 8″ * 8″

SKE12: 12″ * 12″

Z Travel Range

6mm (Fast switching) / 6mm (Fine-tune)

Moving Resolution


Sample fixed mode

Vacuum adsorption

Electrical design

Electrical Floating with Banana plug adapter, can be used as a backside electrode

2. Platen (U Shape)

SKE4: 6 micropositioners available

SKE6: 8 micropositioners available

SKE8: 10 micropositioners available

SKE12: 12 micropositioners available

3. Microscope
Moving range

X-Y : 2″ * 2″,  Z : 50.8mm

Moving Resolution


Switching lens mode

Microscope Manually Tilting 30°by Lever



Lens specification

Eyepiece: 10X ; Objective lens : 5X, 10X, 20X, 50X 100XOption

CCD Pixel

50W (Analog) / 200W (Digital) / 500W (Digital)

4. Micropositioner
X-Y-Z Moving range

12mm-12mm-12mm / 8mm-8mm-8mm

Mechanical resolution

10μm / 2μm / 0.7μm / 0.1μm

Current leakage accuracy

Coaxial 1pA/V @25°C; Triaxial 100fA/V @25°C; Triaxial 10pA@3kv @25°C,
Test conditions: dry environment with ground shielding (air dew point below -40°C)

Cable connectors

Banana head  / Crocodile clip /  Coaxial / Triaxial


1. Gantry design of the Microscope

2. The Microscope can be tilted or pneumatic lifted to change objective lens easily

3. Can be upgraded to do RF, high current testing and laser repair applications

4. high moving accuracy

Main Machine

Module No. Item Description
SKE4 Economical Manual Probe Station Electricity Demand: 220VC, 50~60Hz; Weight (about): 70kg; Dimension: 580mm*620mm*730mm (L*W*H).
SKE6 Economical Manual Probe Station Electricity Demand: 220VC, 50~60Hz; Weight (about): 80kg; Dimension: 640mm*700mm*730mm (L*W*H).
SKE8 Economical Manual Probe Station Electricity Demand: 220VC, 50~60Hz; Weight (about): 85kg; Dimension: 660mm*660mm*700mm (L*W*H).
SKE12 Economical Manual Probe Station Electricity Demand: 220VC, 50~60Hz; Weight (about): 180kg; Dimension: 1030mm*820mm*730mm (L*W*H).

Optional Accessories

Module No. Item
SKE01 Microscope tilt mechanism (Tilting 30°Manually by Lever)
SKE02 Microscope pneumatic lifting mechanism
SKE03 Laser cutting and repairing
SKE04 Probe clamp
SKE05 Dark field of microscope / DIC / Normarski test, Light intensity / wavelength test interface accessory
SKE06 Liquid crystal leakage analysis package
SKE07 High voltage and high current measurement package
SKE08 Hot chuck
SKE09 High/Low temprature chuck
SKE10 Shielding box
SKE11 Special adapter
SKE12 Vibration free table
SKE13 Gold-plated chuck
SKE14 Coaxial / Triaxial chuck
SKE15 Chuck quick pull-out mechanism
SKE16 Chuck rotation fine adjustment
SKE17 Light intensity / wavelength selection
SKE18 RF Testing accessoriess
SKE19 Active probe
SKE20 Low current / Capacitance test
SKE21 intergration of intergral sphere
SKE22 Fixture for Fibre optic coupler test
SKE23 Fixture of PCB / Package test options

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