SKC Series High and Low Temperature Analysis Probe Station

SKC series prober has excellent mechanical system, stable structure and performance, ergonomic design, easy operation, support multi-function upgrade, rich and comprehensive functions. This product is mainly used in the manufacturing and research fields of integrated circuit, LED, LCD, solar cell and semiconductor industry.

Application direction:

LD/LED/PD test, PCB/ package device test, MATERIAL/device IV/CV characteristic test, internal circuit/electrode /PAD test, hf RF test, etc.

Key Features

Low temperature test in non-vacuum environment

Compatible with high magnification metallographic microscope

Suitable in University and Research laboratory

Up to 12-inch wafer testing

High precision lead screw drive structure, linear movement

Comfortable large handle, Driver Screws: Zero back lash

0.2 um or above internal circuit / electrode / PAD probe

LD/LED/PD Light intensity / wavelength testing

IV/CV Characteristic testing of materials / devices

High frequency characteristic test of devices (up to 300GHz)

Model

SKC6

SKC8

SKC12

Electricity Demand

220VC, 50~60Hz

Weight (about)

SKC6: 150kg

SKC8: 170kg

SKC12: 250kg

1. Chuck
Size & Rotation Angle

SKC6: 6″, 360° Rotation

SKC8: 8″, 360° Rotation

SKC12: 12″, 360° Rotation

X-Y Moving Range

SKC6: 6″ * 6″

SKC8: 8″ * 8″

SKC12: 12″ * 12″

Moving Resolution

1μm

Sample Fixed Mode

Vacuum adsorption

Electrical Design

Chuck Surface is Electrical Floating with Banana plug adapter, can be used as a backside electrode

2. Platen
O shape platen

SKC6: 8 micropositioners available

SKC8: 10 micropositioners available

SKC12: 12 micropositioners available

Move range & adjustment

Platen can be quickly lifted up and down 6mm with automatic locking function.

Platen can be fine tuned up and down 25mm precisely with 1μm resolution.

 

3. Microscope
Moving Range

X-Y axis : 2″ * 2″,  Z axis : 50.8mm

Magnification

16~100X / 20~4000X

CCD Pixel

50W (Analog) / 200W (Digital) / 500W (Digital)

4. Micropositioner
X-Y-Z Moving Range

12mm-12mm-12mm / 8mm-8mm-8mm

Mechanical resolution

10μm / 2μm / 0.7μm / 0.1μm

Current Leakage Accuracy

Coaxial 1pA/V @25°C; Triaxial 100fA/V @25°C; Triaxial 10pA@3kv @25°C,
Test conditions: dry environment with ground shielding (air dew point below -40°C)

Cable Connectors

Banana head / Crocodile clip / Coaxial / Triaxial / SMA / K

Dimension

SKH6: 860mm*850mm*700mm (L*W*H)

SKH8: 880mm*860mm*750mm (L*W*H)

SKH12: 1400mm*920mm*920mm (L*W*H)

Main Machine

Module No. Item Description
SKH6 Integrated Manual Probe Station Electricity Demand: 220VC, 50~60Hz; Weight (about): 150kg; Dimension: 860mm*850mm*700mm (L*W*H).
SKM6 Integrated Manual Probe Station Electricity Demand: 220VC, 50~60Hz; Weight (about): 170kg; Dimension: 880mm*860mm*750mm (L*W*H).
SKM6mini Integrated Manual Probe Station Electricity Demand: 220VC, 50~60Hz; Weight (about): 250kg; Dimension: 1400mm*920mm*920mm (L*W*H).

Optional Accessories

Module No. Item
SKC01 Probe clamp
SKC02 Dark field of microscope / DIC / Normarski Testing light intensity / wavelength testing
SKC03 RF Testing
SKC04 High voltage and high current test
SKC05 Shielding box
SKC06 Special adapter
SKC07 Vibration free table
SKC08 Gold-plated chuck
SKC09 Coaxial / Triaxial chuck
SKC10 Light intensity / Spectrum / Wavelength test
SKC11 Active probe
SKC12 Low current / Capacitance test
SKC13 Intergartion of intergral sphere
SKC14 Fixture of Packaged IC test
SKC15 Fixture of PCB test

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