SFA Series Failure Analysis Probe Station

Overview Specifications Ordering Resources

SFA series probe bench is a kind of measuring equipment specially designed for failure analysis laboratory. It has optical characteristic, laser characteristic, stable equipment structure, excellent system performance, ergonomic design, convenient operation, support multi-function upgrade, and rich and complete product functions.

Application direction:

Chip Failure Analysis AT room temperature and high and low temperature rf device Failure analysis MATERIAL/device IV/CV characteristic test and Failure analysis Chip internal circuit/electrode /PAD test IC/ panel internal circuit modification/layer removal.

Key Features

Failure analysis

Chip hot spot detection by liquid crystal

Laser cut ,ablation and selectively remove

Applicable to the internal line modification / repair of the IC/LCD panel

Up to 12-inch wafer testing

Comfortable large handle, Driver Screws: Zero back lash

Internal circuit/ electrode/ PAD probe

RF Devices characteristic

IV / CV characteristic test and failure analysis of Materials / Devices

Laser minimum machining size 1*1μm

Model	SFA-8 SFA-8-SC
Electricity Demand	220VC, 50~60Hz
Weight (about)	SFA-8: 260KG SFA-8-SC: 280KG
1. Chuck
Size & Rotation Angle	8″, 360° Rotation
X-Y Moving Range	8″ * 8″
Moving Resolution	1μm
Sample fixed mode	Vacuum adsorption
Electrical Design	Chuck Surface is Electrical Floating with Banana plug adapter, can be used as a backside electrode.
2. Platen
Specification	SFA-8: U shape Platen, 10 micropositioners available SFA-8-SC: O shape Platen, 12 micropositioners available
Travel & adjustment mode	Platen can be quickly lifted up and down 6mm with automatic locking function, Platen can be fine tuned up and down 25mm precisely with 1μm resolution
3. Microscope
Moving Range	SFA-8: X-Y: 2″ * 2″, Z: 50.8mm SFA-8-SC: X-Y: 1″ * 1″, Z: 50.8mm
Magnification	20~4000X
CCD Pixel	50W (Analog) / 200W (Digital) / 500W (Digital)
4. Micropositioner
X-Y-Z Moving Range	12mm-12mm-12mm / 8mm-8mm-8mm
Mechanical resolution	2μm / 0.7μm / 0.1μm
Current Leakage Accuracy	Coaxial 1pA/V @ 25 ℃; Three shaft 100fA/V @ 25 ℃; Triaxial 10pA@3kv @25°C. Test conditions: dry environment for grounding shield (air dew point lower than – 40 ° C)
Cable Connectors	Banana head / Crocodile clip / Coaxial / Triaxial
Dimension	SFA-8: 960mm850mm1500mm (LWH) SFA-8-SC: 880mm860mm1550mm (LWH)

Main Machine

Module No.	Item	Description
SFA-8	Integrated Manual Probe Station	Electricity Demand: 220VC, 50~60Hz; Weight (about): 260kg; Dimension: 960mm850mm1500mm (LWH).
SFA-8-SC	Integrated Manual Probe Station	Electricity Demand: 220VC, 50~60Hz; Weight (about): 280kg; Dimension: 880mm860mm1550mm (LWH).

Optional Accessories

Module No.	Item
SFA01	Chuck fast pull-out mechanism
SFA02	Hot spot detection by liquid crystal package
SFA03	High voltage / high current test suite
SFA04	Hot chuck
SFA05	Shielding box
SFA06	Special adapter
SFA07	Vibration free table
SFA08	Gold-plated chuck
SFA09	Coaxial / Triaxial chuck
SFA10	Chuck Z quickly lifting and lowering and fine adjustment selection
SFA11	Light intensity / wavelength test
SFA12	RF test accessories
SFA13	Active probe
SFA14	Low current / Capacitance test
SFA15	Fixture for Fibre optic coupler test
SFA16	Fixture of Packaged IC test accessory
SFA17	Fixture of PCB test accessory