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Series / ProductsScan rangeResolutionMeasurement mode
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100 μm x100 μm x10 μmXY: 0.4 nm
Z: 0.04 nmEFM, KPFM, PFM, SCM, MFM, C-AFM(Option) -
Maximum 100 μm x 100 μm x 10 μmZ: 0.05 nm;
X/Y: 0.5 nmEFM, KPFM, PFM, MFM





